[KOSAKA] 코사카 중고 진원도 측정기 EC-1850H

[KOSAKA] 코사카 중고 진원도 측정기 EC-1850H | 중고진원도측정기

 

 

 

 

SPECIFICATIONS.

 

Stage Rotatry table

Rotating method : Unique porous staic air bearing system

Rotating accuracy Thera-Axis : (0.02+0.00035H)um H: Height from table

R-axis : (0.02+0.00035R)um R: Radius from rotation table center

 

 

Table size : ø230mm

Centering.Tilting range : ±5mm / ±1"

Measuring size : ø368mm / 25kg

Loading size : ø510mm

 

Vertical Column

Straightness Accuracy : 0.4um / 100mm (0.8um / 300mm)

Parallelism : 0.5um / 100mm (1um / 200mm)

Vertical Motion range : 300mm (b stylus arm) ID320mm

Max.Measuring height : OD 470mm (B stylus arm) ID 320mm

Measuring Force / Range : 0-100mN (10gf) Variable 1800um

Magnification : 100,200,500,1K,2K,5K,10K,20K,50K